
Henry I. Smith is Professor of Electrical Engineering and Director of the NanoStructures Lab at the MIT. His research includes nanofabrication, electronic and photonic devices, and novel applications of nanostructures. He and his co-workers are responsible for a number of innovations in nanostructures technology and applications including: x-ray lithography, the attenuating phase shifter, spatial-phase-locked e-beam lithography, achromatic-interference lithography, zone-plate-array lithography, interferometric alignment, graphoepitaxy, templated self-assembly, and a variety of quantum-effect, short-channel, single-electron, nanomagnetic, photonic-crystal and microphotonic devices. Prof. Smith is a Fellow of the IEEE and a member of the National Academy of Engineering, the APS, AVS, MRS, OSA and Sigma Xi.